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Development of electronic special gas industry

2020-12-24

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Electronic special gas is widely used in high-tech industries such as semiconductors, microelectronics and related solar cells, or used for thin film deposition, etching, doping, passivation, cleaning, or as a carrier gas, protective atmosphere, and so on. As semiconductor and microelectronics technologies are developing toward higher performance and higher integration, higher and higher requirements are put forward for the purity of electronic special gas, and the purification of electronic special gas is becoming more and more critical and important. The domestic ultra-high purity purification technology mainly relies on imports, and its own technical level (6N) is far behind the international advanced level (8-9N). A well-known domestic project will design and develop a series of high-efficiency, high-capacity, high-selectivity, and low-cost new nano-purifiers, which will affect 5 series of MO sources, inert gases, hydride gases, reactive gases, and corrosive gases. A variety of electronic special gases are purified at the end to increase the purity of electronic special gases from ppm to ppb and ppt levels, and minimize the impact of special gas transmission and control systems on gas purity, thereby greatly improving process capacity and reducing products Defects, increase the yield of the process, and meet the needs of the next generation of semiconductors, microelectronics and related high-tech development. Zhongshan Optoelectronics will form an ultra-high-purity electronic special gas purification technology with independent intellectual property rights to solve the localization of the core technology of ultra-high-purity electronic special gas purification.

From the perspective of the global market, the top five companies of Air Chemical Industry Group, Air Liquide Group, Japan Dayang Nissan Co., Ltd., Praxair Group of the United States, and Linde Group of Germany account for more than 90% of the market share. In the Chinese market, the five giants also occupy nearly 90% of the market share, and the monopoly pattern is obvious.

Chongshan Optoelectronic Materials Co., Ltd. currently mass-produces germanium tetrafluoride, xenon difluoride, chlorine trifluoride, trifluoromethyl iodide, nitrogen trifluoride, germanium tetrafluoride, titanium tetrafluoride, silicon tetrafluoride, hexafluoride Fluorine-Containing High-Purity Electronic Special Gas such as tungsten fluoride, molybdenum hexafluoride, and perfluorobutadiene.

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