2021-08-12
In-depth report on electronic characteristics of semiconductor materials: the blood of wafer manufacturing Sub-gas, an important raw material for the semiconductor industry
Introduction to Electronic Gas
Electronic special gas (referred to as electronic special gas) is an important branch of special gas, and it is an indispensable raw material for the production of electronic industries such as integrated circuits (IC), flat display devices (LCD, LED, OLED), and solar cells.
Generally, the semiconductor production industry divides gases into two types: common gases and special gases. Among them, the commonly used gas refers to a centralized supply and uses a lot of gas, such as N2, H2, O2, Ar, He and so on. Special gas refers to some chemical gases used in the process of semiconductor production, such as extension, ion injection, blending, washing, and mask formation, that is, electronic gases in the gas category, such as high-purity SiH4, PH3, AsH3, B2H6, N2O, NH3, SF6, NF3, CF4, BCl3, BF3, HCl, Cl2, etc. In the IC production process, there are almost 100 kinds of electronic gases used, and about 30 kinds are common in the core section. It is these gases that make silicon chips have semiconductor properties through different manufacturing processes, which in turn determine the performance, integration, and yield of integrated circuits. Even if a certain specific impurity exceeds the standard, it will cause serious quality defects. In severe cases, the entire production line will be contaminated due to the diffusion of unqualified gas, and even the production will be completely paralyzed. Therefore, electronic gas is a key basic m